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From McMaster-Carr
McMaster-Carr

93849A103
Metric 18-8 Stainless Steel Thick Flat Washer M5 Screw Size, 5.3mm ID, 11mm OD, 1.4 mm - 2.4mm Thk

Is this the right washer for the M5 screws holding up the undertray?

If not, can someone please post the correct replacement part? Thanks!
Using my caliper on a stock undertray washer, it measures 5.4mm ID, 18.8mm OD, 1.4mm thick and fits a M5 machine screw so you are close to having the right size with only the OD being too small.
 

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So this one is probably better huh?

91116A140
Metric 18-8 SS Large-OD Flat Washer M5 Screw Size, 5.3mm ID, 15mm OD, 1.0- 1.4 mm Thk
If you don't care that it is slightly smaller in the OD and doesn't exactly match the originals, 9116A140 should work just fine.
 
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